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XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

XLC is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL* family shares common features with all series members. Bodies are made of aluminum for lightweight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.

  • Air pressure applied to pilot port shifts piston-coupled valve
  • Replaceable bellows reduces maintenance cost and waste material
  • Additional maintenance parts available to extend useful life of valve
  • Standard FKM seals, plus 8 additional seal compound options
  • Auto switches mountable from 4 directions
  • Optional 100°C and 150°C heaters (UL compliant lead wire)

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XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal
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Product Options

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Select values from the drop down lists or make appropriate selections to configure the part number.
Flange Size Configuration Status
Flange Type Configuration Status
Port Direction Configuration Status
Temperature Configuration Status
Version Configuration Status
Auto Switch Configuration Status
Lead Wire Configuration Status
Number Configuration Status
Non-standard Indicator Configuration Status
Body Surface Treatment Configuration Status
Seal Material Configuration Status
Seal Replacement Configuration Status
X152 Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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