SEMI Standard Chiller
HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Inverters control the rotations of both the pump and compressor for energy efficiency. Refrigerants include R410A (EU-compliant until Jan 1, 2027; US-compliant until Jan 1, 2026), R454C (EU and US compliant beyond 2025), and CO2. HRZ chillers can circulate various coolants including fluorinated types (Fluorinert™ and GALDEN®), ethylene glycol and water.
HRZF010, SEMI Standard Double Inverter Chiller, R454C Refrigerant
- Cooling capacity: 10kW
- Circulating Fluid: Fluorinert™ or GALDEN® (fluorinated); 60% ethylene glycol
- Temperature range setting: -20 to 90°C (see catalog for conditions)
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC (50Hz) or 3-phase 200~208 VAC (60Hz)
- Standards: CE, UKCA, UL, RoHS, SEMI S2, S8, F47
HRZC010, SEMI Standard Double Inverter Chiller, CO2 Refrigerant
HRZC010 is a water-cooled recirculating chiller for high technology sectors which employs CO2 as a refrigerant. CO2 is the benchmark refrigerant with a GWP of 1, complying with current and future US and EU regulations with the least environmental impact. CO2 is non-toxic, non-flammable, and enables air transport of the chiller. DC inverters on the compressor and pump save operating energy. Front panel includes ventilation intake, emergency shutoff switch, LCD operation panel, and 30A breaker with handle. Rear panel includes water and circulating fluid connections, drain and fluid fill ports, power connections and a ventilation exhaust fan. Casters with brakes allow easy relocation as necessary.
- Cooling capacity: 10kW
- Circulating Fluid: Fluorinert™ or GALDEN® (fluorinated); 60% ethylene glycol
- Temperature range setting: -20 to 90°C (see catalog for conditions)
- Temperature stability: ±0.1°C (fluctuating heat load); ±0.02°C (stable heat load)
- Power supply requirement: 3-phase 200 VAC (50Hz) or 3-phase 200~208 VAC (60Hz)
- Standards: CE, UKCA, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Double Inverter Chiller, for Fluorinated Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
- Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW)
- Note: Temperature range depends on fluorinated fluid choice
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Double Inverter Chiller, for Ethylene Glycol Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: 60% ethylene glycol aqueous solution
- Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW)
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with tap water or deionized water for the coolant.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: tap water or DI water
- Temperature range setting: 10 to 60°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
- Cooling capacities: 8kW
- Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
- Temperature range setting: -20 to 40°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Pump Inverter Chiller, for Tap or DI Water Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
- Cooling capacities: 8kW
- Circulating Fluid: 60% ethylene glycol aqueous solution
- Temperature range setting: -20 to 40°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
INR-495 Thermo-Chillers with CO2 Refrigerant
INR-495-042/043 thermo chillers series uses CO2 natural refrigerant, with GWP of 1, making them a truly eco-friendly choice. This innovative technology ensures compliance with stringent environmental regulations worldwide, including the EU's GWP150 limit, the US's GWP700 limit, and California's GWP750 standard
- Environmentally friendly: Non-F-Gas refrigerant with an ultra-low GWP of 1
- Reduced maintenance: Eliminates the need for F-Gas management, periodic inspections, and costly recovery/disposal.
- Cooling Capacity: 8.5 kW
- Set Temperature: -20 to 70 °C
- Temperature stability: ±1 °C
- Standards: CE, UL, SEMI