SEMI Standard Chiller
HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Inverters control the rotations of both the pump and compressor for energy efficiency. Refrigerants include R410A (EU-compliant until Jan 1, 2027; US-compliant until Jan 1, 2026), R454C (EU and US compliant beyond 2025), and CO2. HRZ chillers can circulate various coolants including fluorinated types (Fluorinert™ and GALDEN®), ethylene glycol and water.
HRZF010, SEMI Standard Double Inverter Chiller, R454C Refrigerant
- Cooling capacity: 10kW
- Circulating Fluid: Fluorinert™ or GALDEN® (fluorinated); 60% ethylene glycol
- Temperature range setting: -20 to 90°C (see catalog for conditions)
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC (50Hz) or 3-phase 200~208 VAC (60Hz)
- Standards: CE, UKCA, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Double Inverter Chiller, for Fluorinated Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
- Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW)
- Note: Temperature range depends on fluorinated fluid choice
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Double Inverter Chiller, for Ethylene Glycol Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: 60% ethylene glycol aqueous solution
- Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW)
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Double Inverter Chiller, for Tap or DI Water Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with tap water or deionized water for the coolant.
- Cooling capacities: 2kW, 4kW, 8kW, 10kW
- Circulating Fluid: tap water or DI water
- Temperature range setting: 10 to 60°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Pump Inverter Chiller, for Fluorinated Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.
- Cooling capacities: 8kW
- Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility)
- Temperature range setting: -20 to 40°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Pump Inverter Chiller, for Tap or DI Water Coolant
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.
- Cooling capacities: 8kW
- Circulating Fluid: 60% ethylene glycol aqueous solution
- Temperature range setting: -20 to 40°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
- Standards: CE, UL, RoHS, SEMI S2, S8, F47
INR-495 Thermo-Chillers with CO2 Refrigerant
INR-495-042/043 thermo chillers series uses CO2 natural refrigerant, with GWP of 1, making them a truly eco-friendly choice. This innovative technology ensures compliance with stringent environmental regulations worldwide, including the EU's GWP150 limit, the US's GWP700 limit, and California's GWP750 standard
- Environmentally friendly: Non-F-Gas refrigerant with an ultra-low GWP of 1
- Reduced maintenance: Eliminates the need for F-Gas management, periodic inspections, and costly recovery/disposal.
- Cooling Capacity: 8.5 kW
- Set Temperature: -20 to 70 °C
- Temperature stability: ±1 °C
- Standards: CE, UL, SEMI