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- XLA Aluminum High Vacuum Angle Valve Normally Closed-Bellows Seal
XLA, Aluminum High Vacuum Angle Valve, Normally Closed/Bellows Seal
Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Â Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. Â XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring. Â The vavle opens when pressure is applied at the pilot port. Â The bellows assembly can be replaced, reducing maintenance costs and waste materials. Â The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows. Â Numerous seal materials are available for a wide range of chmical compatibility.
- Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
- High corrosion resistance to fluorine gas
- Minimal outgassing
- Minimal contamination from heavy metals
- Optional heaters
- Optional position sensors
- Optional oxalic acid anodizing for internals
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