91pornÊÓƵ

AZ3652 & AZ4652, Diaphragm Valve, Manually Operated

Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in manually operated.

  • Cleaned for high purity semiconductor applications
  • Cleanroom assembled and Helium leaked tested
  • Valve meets dimensional requirements of SEMI F36-0299, Option 1
  • User-friendly forged body
  • Compact and lightweight
AZ3652 & AZ4652, Diaphragm Valve, Manually Operated
Configuration Options
  
 
Copy Configuration Number

Product Options

Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Size Configuration Status
Ports Configuration Status
Inlet Connection Configuration Status
Outlet Connection Configuration Status
Seat Material Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

Downloads

The part number needs to be complete in order to view/download CAD Models.

Model does not exist, please email cad@smcusa.com with the complete part number, CAD file format and version required.

CAD is not currently available for auto generation of . The file can be requested by contacting CAD@smcusa.com

CAD Downloads

Download CAD File

View CAD Models

View 3D Model

Product Catalog

RoHS Certificate

Download Certificate