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AZ1300, Single Stage Regulator for Ultra High Purity, High Flow

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

  • For UHP gas delivery
  • Flow capacity to 1000 slpmÌý
  • Body material: 316L SS
  • Inlet pressure:Ìý max. 300 psig (2.1 MPa)

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AZ1300, Single Stage Regulator for Ultra High Purity, High Flow
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Delivery Pressure Configuration Status
Surface Finish Configuration Status
Ports Configuration Status
Connections, Inlet Configuration Status
Connections, Outlet Configuration Status
Gauge Port, Inlet Configuration Status
Gauge Port, Outlet Configuration Status
Pressure Gauge Unit Configuration Status
Seat Material Configuration Status
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  • Red conflict with another selected option value.
  • Amber are not recommended.

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