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AZ1000, Single Stage Regulator, Low to Intermediate Flow w/Optional Bonnet Port

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

  • For UHP gas delivery
  • High inlet pressure type: max. 3500 psig (24.1MPa)
  • Flow capacity: standard to 30 sipm; HF (option) to 120 sipm
  • Body material: 316L SS
  • Hastelloy® internals available for corrosion resistance
  • Point of use and source cylinder applications
AZ1000, Single Stage Regulator, Low to Intermediate Flow w/Optional Bonnet Port
Configuration Options
  
 
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Product Options

Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Delivery Pressure Configuration Status
Material Configuration Status
Surface Finish Configuration Status
Ports Configuration Status
Connections, Inlet Configuration Status
Connections, Outlet Configuration Status
Gauge Port, Inlet Configuration Status
Gauge Port, Outlet Configuration Status
Pressure Gauge Unit Configuration Status
Seat Material Configuration Status
Flow Specification Configuration Status
Bonnet Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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