91pornÊÓƵ

AP500, Single Stage Compact Regulator for Ultra High Purity

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries.  The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

  • For UHP gas delivery
  • Flow capacity: standard to 15 slpm; HF (option) to 30 slpm
  • Body material: 316L SS secondary remelt
  • Hastelloy® internals available for corrosion resistance
  • Sub-atmospheric pressure delivery option
AP500, Single Stage Compact Regulator for Ultra High Purity
Configuration Options
  
 
Copy Configuration Number

Product Options

Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Delivery Pressure Configuration Status
Material Configuration Status
Surface Finish Configuration Status
Range Options Configuration Status
Ports Configuration Status
Connections, Inlet Configuration Status
Connections, Outlet Configuration Status
Gauge Port, Outlet Configuration Status
Pressure Gauge Unit Configuration Status
Seat Material Configuration Status
Flow Specification Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

Downloads

The part number needs to be complete in order to view/download CAD Models.

Model does not exist, please email cad@smcusa.com with the complete part number, CAD file format and version required.

CAD is not currently available for auto generation of . The file can be requested by contacting CAD@smcusa.com

CAD Downloads

Download CAD File

View CAD Models

View 3D Model

Product Catalog

RoHS Certificate

Download Certificate