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- AP1100 Single Stage Regulator for Ultra High Purity Delivery of Sub-atmospheric Pressure
AP1100, Single Stage Regulator for Ultra High Purity, Delivery of Sub-atmospheric Pressure
Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries.Ìý The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options includeÌýHastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
- For UHP gas delivery
- Sub-atmospheric to low positive pressure deliveryÌý
- Flow capacity: toÌý0.5 slpm
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
Ìý
RoHS Certificate
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